The lchinath of the microneedles varies in order to reach the certain depth according to its use. In general the needles are short in 0.1~1.0mm and thin in 0.05~0.4mm thickness.

The tip of the needle must be sharp enough to be inserted in the skin easily. MEMS(Micro Electro Mechanical System) is used to make this small and complicated shape. It adopts technologies used when manufacturing mechanical structure or elements by applying technology of semiconductor manufacturing process.

The following processes are the examples of MEMS processes which modify the original exposure or etching processes.

   
Examples of MEMS technologies
Modified LIGA process
 
   
   
 
Inclined deep X-ray lithography
 
   
   
 
Cubic LIGA Technology
 
   
   
 
Modified X-ray Mask
 
   
   
 
Reflow process
 
   
   
 
Inclined UV exposure
 
   
   
 
Exposure using diffraction
 
   
   
 
Muti exposure and pynolysis