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Micro-mold fabrication
5. Micro-mold fabrication
The length of the microneedles varies in order to reach the certain depth according to its use. In general the needles are short in 0.1~1.0mm and thin in 0.05~0.4mm thickness. The tip of the needle must be sharp enough to be inserted in the skin easily. MEMS(Micro Electro Mechanical System) is used to make this small and complicated shape. It adopts technologies used when manufacturing mechanical structure or elements by applying technology of semiconductor manufacturing process. The following processes are the examples of MEMS processes which modify the original exposure or etching processes.
- Examples of MEMS technologies
- Modified LIGA process
- Inclined deep X-ray lithography
- Cubic LIGA Technology
- Modified X-ray Mask
- Reflow process
- Inclined UV exposure
- Exposure using diffraction
- Muti exposure and pynolysis